LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD,申请号SG20030003654-传众专利搜索

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发明名称	LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
申请公布号	SG108317(A1)	申请公布日期	2005.01.28
申请号	SG20030003654	申请日期	2003.06.05
申请人	ASML NETHERLANDS B.V.	发明人	COX, HENRIKUS, HERMAN, MARIE;VAN BALLEGOIJ, ROBERTUS, NICODEMUS, JACOBUS;VOSTERS, PETRUS, MATTHIJS, HENRICUS;HOL, SVEN, ANTOIN, JOHAN;CORNELISSEN, SIMON, MARIA, JAN
分类号	B23Q1/58;B23Q11/00;F16F15/02;G03F7/20;H01L21/027;(IPC1-7):G03F7/20;B60T13/74;G03F9/00	主分类号	B23Q1/58
代理机构		代理人
主权项
地址

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