| 摘要 |
PROBLEM TO BE SOLVED: To reduce or eliminate the nonuniformity of detected light intensity depending on the nonuniformity of light intensity distribution on an inspected surface with a light beam incident thereupon, when detecting scattered light by decomposing it into a plurality of channels, as to this surface inspection device. SOLUTION: A light intensity detection means 50 detects the intensity of scattered light from each area of an irradiation field 220 by spatially decomposing it so that the intensity of decomposed/scattered light detected by channel ch does not depend on nonuniformity of received light intensity distribution among respective areas in the irradiation field 220. The gain of each amplifier 52 corresponding to each decomposition channel ch of the detection means 50 is adjusted to standardize the intensity of decomposed/scattered light. COPYRIGHT: (C)2005,JPO&NCIPI
|
