| 摘要 |
PROBLEM TO BE SOLVED: To solve problems that the spring constant of a pressure regulating spring must be changed to a predetermined value because attraction forces to be applied to a valve element and a diaphragm must be changed accordingly when the kind of gas to be used is changed in a proportional control valve with closing function which has the diaphragm and uses the pressure regulating valve, and the proportional control valve must be disassembled once with troublesome works to change the pressure regulating spring. SOLUTION: A drive means 6 to open a proportional control valve 1 has a drive source 63 with an output shaft 63a thereof being reciprocal. When a solenoid 62 is connected to the output shaft of the drive source, and a valve body 2 is moved in the valve-opening direction by driving the drive source, a coil 62b of the solenoid is energized to attract a movable core 62c in the valve-opening direction so that the pressure of the output shaft is transmitted to a valve element via the movable core. COPYRIGHT: (C)2005,JPO&NCIPI
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