发明名称 |
Magnetically actuated fast MEMS mirrors and microscanners |
摘要 |
Magnetically and electromagnetically driven MEMS devices for reflecting light signals and for switching radio frequency (RF) signals are provided. In a preferred embodiment, a light reflecting device such as a mirror or micro-scanner comprises a plate operative to reflect light and at least two conductive flexural actuators connected to the plate and to a substrate and operative to impart a rotation or tilt motion to the plate under a force arising from the interaction of a current passing through the conductive flexural actuators and a magnetic field parallel to the substrate. An RF switch comprises a substrate and a membrane having a longitudinal dimension and a lateral dimension, the membrane positioned substantially parallel to and attached to the substrate and operative to provide at least two switching positions in response to actuation by a Lorenz force acting on it.
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申请公布号 |
US2005018322(A1) |
申请公布日期 |
2005.01.27 |
申请号 |
US20040853097 |
申请日期 |
2004.05.26 |
申请人 |
TERRAOP LTD. |
发明人 |
BEN-GAD ELIEZER;MEDINA MOSHE;HERSHCOVITZ MIRIAM;HUBER AVIGDOR;KRYLOV SLAVA |
分类号 |
G02B26/08;(IPC1-7):G02B5/02;G02B5/08;G02B13/20 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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