| 摘要 |
A positioning stage 10 is constructed of a base 12, a Y-axis direction positioning means 14, and an X-axis direction positioning means 16. The Y-axis direction positioning means 14 is a means for moving an object in a Y-axis direction to position it. The Y-axis direction positioning means 14 is provided with a first table 24(1), a first joint 26(1), a first clutch 28(1), and a first forcibly-moving means 30(1). An X-axis direction positioning means 16 is provided with a second table 24(2), a second joint 26(2), a second clutch 28(2), and a second forcibly-moving means 30(2).
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