Substratbehandlungsvorrichtung und Verfahren sowie durch dieses Verfahren behandelte Codierskala

摘要

A method of forming an encoder scale for a measurement device is disclosed. The method comprises taking a laser and a substrate carrying an etch-resistant film. Parts of the etch-resistant film are removed by use of the laser, thereby forming a pattern on the substrate that defines an encoder scale, and the substrate is etched through the parts of the etch-resistant film that have been removed by the laser.