发明名称 |
Transport device for transporting flat substrates in a vacuum coating installation comprises using a detachable bearing with an interlocking connection as a drive bearing and as a counter bearing |
摘要 |
<p>Transport device comprises using a detachable bearing with an interlocking connection as a drive bearing (7a) and as a counter bearing (7b).</p> |
申请公布号 |
DE10328273(A1) |
申请公布日期 |
2005.01.27 |
申请号 |
DE2003128273 |
申请日期 |
2003.06.23 |
申请人 |
VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
MELCHER, JENS;KRAUSE, JOCHEN;HOFMANN, MICHAEL |
分类号 |
B65H5/06;B65H27/00;B65H29/20;C03B35/16;C03B35/18;(IPC1-7):B65G39/10;C23C14/00 |
主分类号 |
B65H5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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