发明名称 Transport device for transporting flat substrates in a vacuum coating installation comprises using a detachable bearing with an interlocking connection as a drive bearing and as a counter bearing
摘要 <p>Transport device comprises using a detachable bearing with an interlocking connection as a drive bearing (7a) and as a counter bearing (7b).</p>
申请公布号 DE10328273(A1) 申请公布日期 2005.01.27
申请号 DE2003128273 申请日期 2003.06.23
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 MELCHER, JENS;KRAUSE, JOCHEN;HOFMANN, MICHAEL
分类号 B65H5/06;B65H27/00;B65H29/20;C03B35/16;C03B35/18;(IPC1-7):B65G39/10;C23C14/00 主分类号 B65H5/06
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