| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the reliability and performance of a vacuum micro device using fullerene or a carbon nanotube for an emitter. <P>SOLUTION: A vacuum micro device comprises a support substrate 51, a cathode line 52 formed on the substrate 51, an emitter formed of a metal plated layer 56 formed with approximately uniform thickness on an upper face and along a side face of the cathode line 52 and of fullerene 16 or a carbon nanotube 57 of which the part is embedded in the layer 56, and a draw-out electrode 54 disposed with spaces to the emitter and emits electrons from the emitter by a potential difference from the potential of the emitter. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
