| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide type optical switch with current confinement structure which has simple constitution and easily manufactured. <P>SOLUTION: The optical switch which switches a transmission path for an optical signal through refractive index variation by carrier injection is provided with a semiconductor substrate, a lower clad layer formed on the semiconductor substrate, an optical waveguide layer which is on the lower clad layer and has an optical waveguide where the optical signal is made incident from one side to branch into two halfway and is emitted, an upper clad layer which is formed on the optical waveguide layer and obtained by etching the circumference of the optical waveguide, a contact layer which is formed on the upper clad layer where the upper clad layer is not etched, an oxidized film which is formed on a part of other than the upper clad layer and the contact layer, a 1st electrode which is formed at a part on the contact layer, and a 2nd electrode 2 which is formed on the rear surface of the substrate, and the optical switch is provided with an impurity diffusion area for current confinement at the part of the lower clad layer not right below the 1st electrode. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
