| 摘要 |
PROBLEM TO BE SOLVED: To provide a flash lamp light irradiation device wherein an oil or smoke producing from a power section including a capacitor is hard to be adhered to a semiconductor substrate or a flash lamp in a process treatment facility. SOLUTION: The flash lamp light irradiation device is provided with a light irradiator that is provided with a plurality of flash lamps and at least one reflection mirror, a power supply that is provided with a plurality of capacitors to supply an emission energy to the flash lamps, and a common charging circuit to supply charging current to the capacitors. The light irradiator is installed within a downflow type clean room wherein a clean air supplied from an air-conditioner is blown off from its ceiling and it is discharged from its bottom or side bottom, and the power supply section is installed outside the clean room and it is arranged on the downstairs of the downstream side of the air discharged from the clean room or in an air supply/exhaust facility independent of the light irradiation section. COPYRIGHT: (C)2005,JPO&NCIPI |
