| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus, etc. which can reduce a disturbance magnetic field arising due to generation of eddy current in association with the drive of a linear motor. SOLUTION: The stage apparatus 10 includes a plurality of aligned tile-like permanent magnets 30 provided along a moving direction on the upper and the lower plates of a guide member 13A (14A). Meanwhile, the stage apparatus 10 also includes an electromagnetic coil and a heat pipe 41 mounted at a Y slider. A length L (length along the moving direction) of the heat pipe 41 is set to seven times as large as the pole pitch P of the permanent magnet 30. Thus, eddy current generated in the heat pipe 41 in association with the drive of a stage can be reduced, and the change of a disturbance magnetic field can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI
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