SOFT MAGNETISM THIN FILM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic thin film, a method of manufacturing the same and a magnetic head for realizing the characteristics that saturated magnetic flux Bs is 23kG or more and resonance frequency is 1GHz or more even when a non-magnetic underlayer film is used. SOLUTION: A structure in which an underlayer film 120 and a magnetic film 130 are formed on a substrate 110 is defined as a basic structure. In this structure, the structure including a non-magnetic underlayer can realize the soft magnetic characteristic in the same degree as the structure including a magnetic underlayer by using Fe-Co-Al-O magnetic film as the underlayer 120. Moreover, there is provided also a structure that can alleviate influence of demagnetizing field by introducing a multilayer film formed by laminating the Fe-Co-Al-O magnetic film to hold a Cu film as the intermediate layer. COPYRIGHT: (C)2005,JPO&NCIPI