A MOTOR COMBINING A RESONANT VIBRATION MODE, A STEPPING MODE AND A DIRECT POSITIONING MODE

摘要

Present invention describes a new motor the allows very accurate and fast positioning. The motor comprises a fixed frame (9, 9a), two actuators (6, 7), and a stator (8) that can operate in three operation modes. The first operation mode is called the "resonant vibration mode", in this operation mode the motor can be classified as a bimodal ultrasonic motor. The second is called the "stepping mode", in which the motor operates as a walking drive. Finally, the third operation mode is called the "direct positioning mode", in which the motor can be classified as a flexure nanopositioner. Each of these three operation modes has its own specific characteristics: the resonant vibration mode allows fast, but coarse positioning with a large stroke. The stepping mode allows accurate, but slow positioning with a large stroke and the direct positioning mode allows very accurate and fast positioning with a small stroke. Combining these three operation modes results in a compact, accurate and fast motor.