申请人 |
APPLIED MATERIALS, INC.;YANG, MICHAEL X;LUBOMIRSKY, DMITRY;DORDI, YEZDI N.;SINGH, SARAVJEET;TULSHIBAGWALE, SHESHRAJ L.;KOVARSKY, NICOLAY Y. |
发明人 |
YANG, MICHAEL X;LUBOMIRSKY, DMITRY;DORDI, YEZDI N.;SINGH, SARAVJEET;TULSHIBAGWALE, SHESHRAJ L.;KOVARSKY, NICOLAY Y. |