Verfahren zur Messung von Verunreinigungen

摘要

A drop (17) which is hydrophobic to the surface of an object (14) to be measured is dropped on the surface of the object and moved so as to be brought into contact with the overall surface of the object to be measured. After the movement, the drop is recovered and analyzed by chemical analysis to measured the kind of element and content of an impurity adsorbed on the surface of the object to be measured.