| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference measuring method capable of reducing measurement errors without reductions in operation accuracy and improving accuracy in acquiring the phase distribution of interference fringes. SOLUTION: Not only the light intensity distribution of the interference fringes but also the light intensity distribution (I<SB>t</SB>) of an image of a prescribed location of an object to be inspected formed on an observation surface (17) by luminous flux (Lt) to be inspected and the light intensity distribution (I<SB>r</SB>) of an image of a prescribed location of a reference object formed on the observation surface (17) by reference luminous flux (Lr) are each measured. Information on the two measured light intensity distributions is used with information on the light intensity distribution (I<SB>1</SB>) of the interference fringes for operation on the phase distribution of the interference fringes. Since the information on the the light intensity distributions of the images is used, the need for moving the reference object or the object to be inspected as before is suppressed to suppress measurement errors caused by attitude changes at its movement. Since the light intensity distributions of the images are not affected by phases, they are hardly affected by disturbances in comparison with the case that the intensity distribution of the interference fringes is to be measured. Therefore, it is possible to suppress measurement errors caused by disturbances. COPYRIGHT: (C)2005,JPO&NCIPI
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