| 摘要 |
PROBLEM TO BE SOLVED: To provide a spatial light modulator including an array of elements which are independently controlled, which is used as a patterning means for a lithographic projection device and has a high data transmission speed necessary for address designation of pixels and a compact configuration. SOLUTION: In the respective pixels 10 of the spatial light modulator PPM, a movable mirror 11 which forms a projection beam modulator element and a mirror actuator 13 are fitted on one side of a substrate 16, and a pixel control circuit device 15 for setting the modulation element according to a desired pattern is fitted on the other side. The circuit device includes at least one of a D/A convertor, an A/D converter, an optical fiber input and a plurality of microprocessors, thus, optical data transmission, the delivery of compressed data to the optical light modulator, the cancellation of data compression, the analog drive of a mirror and an automatic calibration of respective pixels are possible, and the spatial light modulator is very compact because both sides of the substrate 16 are used. COPYRIGHT: (C)2005,JPO&NCIPI
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