发明名称 CLEANLINESS MEASURING INSTRUMENT, AND CLEANLINESS MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To solve a problem wherein an error caused by "a lens aberration" is generated when converging lights by such a lens or the like as used in an area sensor camera for acquiring the lights collected by the lens or the like having two-dimensional spreading by a picture element unit, and a problem wherein measuring precision is limited as a linear image is focused as a curved image, as a specific example of the "lens aberration", the ratio between respective parts in an actual object is different from the ratio between respective parts in the focused image, or as likely, since generation of a phenomenon that an image focused in an imaging element inside a CCD camera is different from the actual object is well known generally. SOLUTION: This cleanliness measuring instrument for acquiring information as to a deposit contained in a collected liquid collected after cleaning a cleaned object, by image processing is provided with a line sensor camera 15 as one example of an imaging means for photographing the deposit by scanning it. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005024478(A) 申请公布日期 2005.01.27
申请号 JP20030270081 申请日期 2003.07.01
申请人 MORIAI SEIKI KK 发明人 MORIAI CHIKARA
分类号 G01N15/00;B08B3/00;G01N15/02;(IPC1-7):G01N15/00 主分类号 G01N15/00
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