Method and apparatus for optically measuring absolute displacement

摘要

A method and apparatus using two sets of polarized light detection systems are disclosed for optically measuring absolute displacement. In the first detection system a step motor is controlled to drive an analyzer to trace synchronously the displacement being measured by comparison of the magnitude of the intensity of two orthogonal light beams and then the number of control pulses from the step motor becomes a value of the displacement measured; and by comparison with the magnitude the intensity of a plurality of light beams with phase difference from a plurality of light paths in the second polarized light detection system the section of system operation is ascertain and consequently the absolute displacement is detected and measured.