TELECENTRICITY ADJUSTING METHOD OF IMAGE OBSERVING APPARATUS, FOCUSING POSITION MEASURING METHOD THEREOF, EXPOSURE APPARATUS AND FOCUSING POSITION MEASURING METHOD OF PROJECTION OPTICAL SYSTEM INCLUDING IMAGE OBSERVING APPARATUS ADJUSTED AND MEASURED THEREWITH ADJUSTING METHOD OR MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide the telecentricity adjusting method of an image observing apparatus which can adjust, with higher accuracy, telecentricity of an image observing apparatus using a low price tool. SOLUTION: In this telecentricity adjusting method of the image observing apparatus, the image of an observation object is formed on the imaging surface of an imaging element 28 on the basis of the light from the observation object via an objective optical system 22 by guiding the light to the observation object from the predetermined secondary light source 10b. This adjusting method comprises a secondary light source image forming process to form the image of the predetermined secondary light source on the predetermined surface on the basis of the light from the predetermined secondary light source 10b via the objective optical system 22, an image focusing aperture iris image forming process to form an image of the image focusing aperture iris 20 applicated between the objective optical system 22 and the imaging element 28 to the predetermined surface on the basis of the light from the predetermined secondary light source 10b via the objective optical system 22, and an adjusting process to adjust the location of the predetermined secondary light source 10b on the basis of both images of the secondary light source and the image focusing aperture iris. COPYRIGHT: (C)2005,JPO&NCIPI