CLEANING AGENT FOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning agent for cleaning a substrate in a short time. SOLUTION: Disclosed is a cleaning agent for substrates which contains a compound represented by the general formula shown. In the formula, R1to R3are independently hydrogen, hydroxy group, an alkyl group, an alkenyl group, an alkynyl group, an acyl group, an alkoxy group, an amidyl group, a carboxy group, an alkoxy alkyl group, an alkyl sulfonyl group, a sulfonic acid group, or an aromatic substituent. COPYRIGHT: (C)2005,JPO&NCIPI