| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that mirror sections of many micromirror devices (MMDs) are supported by cantilevers and therefore vibrations are likely to be generated during working and control becomes unstable and with the MMD using the both ends-supported beam, the opposed surfaces on which the beams abut are divided to the first opposed surface and the second opposed surface varying in the angle with a reference plane and both are connected by a flexure point, making manufacturing processes complex. SOLUTION: The optical modulator is constituted by provide the top of a substrate 202 having flat parts on both sides of a shallow recessed part of nearly a V shape with the both ends-supported beam 201 which is fixed at both ends to the flat parts and has a light reflection film 206 so as to be spanned in the recessed part. The recessed part has the first opposed surface 207a on the side near the fixed end 201a of the both ends-supported beam 201 and a second opposed surface 207b connected thereto and provided with a substrate electrode 204. The first opposed surface 207a and the second opposed surface 207b constitute the same face. The both ends-supported beam 201 is adapted to be deformed by electrostatic attraction so that the reflection direction of light can be changed. COPYRIGHT: (C)2005,JPO&NCIPI
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