| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that introduction of the conventional nano inprint processing apparatus into mass-production and practical use is difficult. SOLUTION: In the microfabrication method for transferring an inverted concave and convex pattern of the original pattern to a substance to be processed by pressing the original pattern to the surface of the substance, conditions for process are set by pressing the original pattern to the predetermined member before process of the substance to be processed. COPYRIGHT: (C)2005,JPO&NCIPI
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