METHOD OF MEASURING THICKNESS OF FILM COATING ON CERAMIC MEMBER, ITS SYSTEM, AND METHOD FOR MANUFACTURING FILM COATED CERAMIC MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a nondestructive method for measuring the thickness of a ceramic film coating on a ceramic member which is formed with the ceramic film on a ceramic substrate, and to provide a device for measuring the thickness of the ceramic film capable of measuring the thickness of the film of the ceramic member without harming the film. SOLUTION: The measuring device for measuring thickness of the ceramic film formed on the ceramic member comprises: a work deck for placing a work to be measured having a curved shape; a photo-distance sensor for measuring the distance from a prescribed position in the inside surface of the member to be measured placed on the work deck to the photo-distance sensor; a rotational mechanism for rotating the photo-distance sensor; a sensor elevating mechanism for elevating the distance sensor by elevating the sensor rotational mechanism; and a sensor elevated position detection sensor for detecting the elevated position of the sensor elevation mechanism. COPYRIGHT: (C)2005,JPO&NCIPI