发明名称 Method for evaluating image formation performance
摘要 The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of image formation performance of an optical system obtained is a pupil transmittance distribution (a distribution of light transmittance on an exit pupil surface) of a light beam that enters an image point to be evaluated of the optical system. At least one of a rotational symmetrical component, an odd symmetrical component, and an even symmetrical component is extracted from the obtained pupil transmittance distribution as an evaluation index.
申请公布号 US2005018277(A1) 申请公布日期 2005.01.27
申请号 US20040921138 申请日期 2004.08.19
申请人 NIKON CORPORATION 发明人 OZAWA TOSHIHIKO
分类号 G02B7/36;G02B27/00;G03F7/20;(IPC1-7):G02B5/30 主分类号 G02B7/36
代理机构 代理人
主权项
地址