| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid jet head which keeps the inside of a piezoelectric element holding part at a predetermined humidity and which can surely prevent the destruction of a piezoelectric element, a manufacturing method therefor, and a liquid jet apparatus. <P>SOLUTION: The liquid jet head is equipped with: the piezoelectric element 300 which is composed of a lower electrode 60 provided on the side of one surface of a flow channel forming substrate 10 via a diaphragm, a piezoelectric body layer 70, and an upper electrode 80; and a sealing substrate 30 which has the piezoelectric element holding part 31 capable of sealing a space large enough to prevent the inhibition of the movement of the piezoelectric element 300, in the state of securing the space on the surface, on the side of the piezoelectric element 300, of the substrate 10. The sealing substrate 30 has a sealing chip 120 which is joined to an outside opening of a sealing hole 32 provided in such a manner as to passe through the sealing substrate 30 and make the holding part 31 communicate with the outside, and which is provided with a communication hole 121 communicating with the sealing hole 32. The sealing part 31 is sealed with a sealing member 123 which is composed of a metal welded to an opening of the communication hole 121 of the sealing chip 120. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
