| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly accurately feed chemical in delivering chemical to a substrate. <P>SOLUTION: A delivery pump 2 is provided with a casing 21, a piston 22, a drive mechanism 23, feeding line 24, delivery line 25 and an open close valve 26. The drive mechanism 23 is provided with a motor 230, a ball screw 231, and a magnet 232. The drive mechanism 23 supports a piston 22 enclosed in the casing 22 by magnetic force of the magnet 232 and move the magnet 232 along the ball screw 231. Accordingly, the piston 22 moves in X axis direction and volumes of a space Pa and a space Pb change. The delivery pump 2 opens and closes the open close valve 26 according to change of volume of the space Pa and the space Pb and feeds resist liquid to a slit nozzle 4 via the delivery line 25 and receives resist liquid from a chemical feeding mechanism 3 via the feeding line 24. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
