TWO-AXIAL ROTATING TABLE DEVICE AND DRIVEN BODY ROTATION CONTROL SYSTEM

摘要

PROBLEM TO BE SOLVED: To realize a two-axial rotating table device, small-sized and driven to rotate with high accuracy.

SOLUTION: This two-axial rotating table device includes: a first rotating member 104 and a second rotating member 103 rotated round a first axis T independently of each other; a first driving source 101 for driving a support member 115 on which the driven body is mounted through the first rotating member to rotate round the first axis; and a second driving source 102 for driving the second rotating member to rotate. Further, the device includes: a converting mechanism for converting the rotation of the second rotating member to the rotation round a second axis P extended in the direction different from that of the first axis to rotate the support member round the second axis; and first and second detectors 111 to 114 for detecting the driving amount of the first and second driving sources. The first driving source and the second driving source are disposed on the first axis. The connecting part 115b of the support member and the first rotating member and the detectors are provided on the opposite sides with the first and second driving sources interposed between them.

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