| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device for monitoring the energy of a laser beam machining apparatus capable of detecting the energy on the side of a movable shaft after branching with high accuracy in order to enhance the reliability of laser beam machining. <P>SOLUTION: In this device, a condensing lens 42 and a photo sensor 44 are disposed on a rack 50 moved together with a beam splitter 40 so that the distance N between the condensing lens 42 and the photo sensor 44 on a second stage on the movable shaft side is unchanged irrespective of the movement of the movable shaft (here, a galvano-unit 32) side. Therefore, the beam diameter M incident on the photo sensor 44 becomes constant, and the energy can be detected with high accuracy. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
