| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY stage provided with a function of suppressing pitching and rolling even when a slider part is moving or stopping. SOLUTION: The XY stage carrying out two-dimensional position control of the slider part is characterized by that it has a first Z-axis sensor outputting a signal for detecting a pitching angle of the slider part, and a second Z-axis sensor outputting a signal for detecting a rolling angle of the slider part. COPYRIGHT: (C)2005,JPO&NCIPI
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