| 摘要 |
PROBLEM TO BE SOLVED: To provide a separating/refining device for a fluorine compound gas capable of being operated with a stable high recovery rate, and having high cost performance. SOLUTION: This device is constituted to separate and refine the fluorine compound gas from a feed gas including several kinds of fluorine compound gases of various boiling points. This device comprises a first refinery tower 1 for separating the fluorine compound gas of comparatively high boiling point as the liquid of a tower bottom part by cryogenic separation, adsorption towers 3a, 3b for adsorbing and separating the remaining fluorine compound gas of high boiling point from a top-part gas derived from a tower top part of the first refinery tower 1, and a second refinery tower 2 for separating the fluorine compound gas of low boiling point having the boiling point lower than that of the fluorine compound gas of high boiling point from the gas derived from the adsorption towers 3a, 3b, as the liquid of the tower bottom part by cryogenic separation. COPYRIGHT: (C)2005,JPO&NCIPI
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