| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate positioning device which can correct a warpage or deformation of a glass substrate and position it at a reference position. SOLUTION: A roller 5 having a V-shaped groove 7 for position correction formed therein along the full periphery of a side surface 6 is pushed against an end of a glass substrate 2. COPYRIGHT: (C)2005,JPO&NCIPI |
