| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a utilizing rate of an X-ray device is not improved because of necessity for exchanging an X-ray take-out window within a short period for preventing fatigue cracking caused by a shock wave generated at a plasma X-ray source. SOLUTION: The beryllium foil of the X-ray take-out window is applied to a hole formed in an elastic film, and a shock wave is received by the elastic film. By the above, an deformation amount of the beryllium foil itself is reduced, the concentration of stress is relaxed, and the life of the window is prolonged. COPYRIGHT: (C)2005,JPO&NCIPI |
