| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference filter in which an optical gap, which is a parallel gap between two reflection films, can be accurately formed and kept, and to provide a variable wavelength interference filter and a method of manufacturing the filters. SOLUTION: In the interference filter which is formed by oppositely arranging two reflection films 16 and 19 with a predetermined parallel space, the reflection film 16 is formed on the bottom face 14 of a recessed part 13 which is formed on a silicone substrate or a SOI (silicon-on-insulator) substrate 11 by etching. COPYRIGHT: (C)2005,JPO&NCIPI
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