发明名称 Semiconductor device and semiconductor substrate
摘要 In order to provide a semiconductor device having a field effect transistor with a low power consumption and a high speed by use of the combination of Si and an element such as Ge, C or the like of the same group as Si, a strain is applied by a strain applying semiconductor layer 2 to a channel forming layer 1 having a channel of the field effect transistor formed therein so that the mobility of carriers in the channel is made larger than the mobility of carriers in that material of the channel forming layer which is unstrained.
申请公布号 US2005017236(A1) 申请公布日期 2005.01.27
申请号 US20040920432 申请日期 2004.08.18
申请人 HITACHI, LTD. 发明人 SUGII NOBUYUKI;NAKAGAWA KIYOKAZU;YAMAGUCHI SHINYA;MIYAO MASANOBU
分类号 H01L29/78;H01L21/8238;H01L27/092;H01L29/06;H01L29/10;H01L29/76;H01L29/778;H01L29/94;(IPC1-7):H01L29/06 主分类号 H01L29/78
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