| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage box that is suitable for putting substrates into processing devices in which the substrates need to be positioned, for taking the substrates out of the devices, and for conveying the substrates between the processing devices. SOLUTION: The substrate storage box (300) is for storing substrates and comprises at least a box body (301) and a rigid inner plate (302), which is disposed within the box and positions the substrates stored. The inner plate includes positioning mechanisms (304), and the box body (301) is made of a material having rigidity lower than that of the inner plate (302). Thus, since the substrate storage box comprises the inner plate for positioning and the box body for protecting the contents from transportation environment, the cost can be reduced as a matter of course and transportation is facilitated. Further, the substrate storage box can directly be loaded on the devices in a process. COPYRIGHT: (C)2005,JPO&NCIPI |
