| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein conventional methods and apparatuses for inspecting shape abnormalities have difficulty in reliably detecting shape abnormalities across the inside of a cavity for a work in which a cavity having a complicated shape is formed, wherein there are some areas which resist being intruded by air or the like. SOLUTION: The method detects shape abnormalities within the cavity 11 of the work 10. After filling the cavity 11 with smoke, the cavity is irradiated with blue light or light having shorter wavelengths than blue light from an opening 12 at one end of the cavity 11. The amount of light of the irradiation light is measured at an opening 13 at the other end. The magnitude of the measured amount of light is defined as a criterion for whether there are shape abnormalities or not in the cavity. COPYRIGHT: (C)2005,JPO&NCIPI
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