METHOD OF MANUFACTURING SINGLE-WALL CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a single-wall carbon nanotube in which the individually separated monolayer carbon nanotube and/or the orientated monolayer carbon nanotube is manufactured at a low temperature of≤600°C by using a magnetron plasma CVD method. SOLUTION: A substrate is placed direct below a magnetron type discharge electrode where a high frequency electric field applied from the outside intersects a stationary magnetic field at a right angle, a metallic catalyst supported on a support is fixed on the substrate, magnetron plasma is produced under the coexistence of a hydrocarbon gas while heating the substrate by a heater and the single-wall carbon nanotube is formed on the metallic catalyst under the DC bias control of the substrate. COPYRIGHT: (C)2005,JPO&NCIPI