发明名称 Stable electroless fine pitch interconnect plating
摘要 A method and apparatus for plating facilitates the plating of a small contact feature of a wafer die while providing a relatively stable plating bath. The method utilizes a supplemental plating structure that is larger than a die contact that is to be plated. The supplemental plating structure may be located on the wafer, and is conductively connected to the die contact. Conductive connection between the die contact and the supplemental plating structure facilitates the plating of the die contact. The supplemental plating structure also can be used to probe test the die prior to singulation.
申请公布号 US2005020064(A1) 申请公布日期 2005.01.27
申请号 US20030622497 申请日期 2003.07.21
申请人 LINDGREN JOSEPH T. 发明人 LINDGREN JOSEPH T.
分类号 H01L21/288;H01L21/44;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L21/288
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