Micromechanical pressure sensor, has component bordering on another component, where cavity of latter component is arranged or structured so that medium to be measured gains access to diaphragm through cavity

摘要

The sensor has a component (110) bordering on another component (101). The component (101) has a diaphragm and a cavity. The cavity is arranged or structured so that a medium to be measured gains access to the diaphragm through the cavity. The component has an opening that guides the medium to be measured to the cavity. A part of the cavity represents an extension of the opening in the component (110). An independent claim is also included for a method for making a pressure sensor.