| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor for independently measuring angular velocities at the same time by using a piezoelectric vibration-type inertia sensor when exciting one sensor element to turn it centering around two axes orthogonal to its vibrating direction. <P>SOLUTION: When turning the sensor element centering around two axes orthogonal to an axis parallel to the vibrating direction with a vibration part of the sensor element unidirectionally excited, the sizes of Coriolis force generated by the respective turns are independently detected by this biaxial detection-type inertia sensor. Stretching vibration is used as a mode of excited vibration and bending vibration is used as a vibration mode when detecting Coriolis force. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
