| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic joined body which can uniformly heat an object to be heated such as a liquid crystal substrate or the like without causing a temperature distribution on a heat surface of a ceramic substrate. SOLUTION: In the ceramic joined body, a protection ceramic body is joined to the bottom of the disc-shaped ceramic substrate provided with a conductor therein. A heat conductivity of the protection ceramic body is 80% or less of the heat conductivity of the ceramic substrate. COPYRIGHT: (C)2005,JPO&NCIPI |
