| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying device enhancing ease of handling. SOLUTION: An air-blowing type support means 3 for blowing air toward a lower surface part of an article 2 to be conveyed and supporting the article 2 to be conveyed in the non-contact state; and a driving force imparting means for imparting driving force in a conveying direction against the article 2 to be conveyed supported by the air-blowing type support means 3 are provided. The air-blowing type support means is provided with a dust removal filter 5 for removing dusts; and a fan means 6 for blowing clean air toward the lower surface part of the article to be conveyed through the dust removal filter 5. The fan means 6 is constituted so that an air-blowing amount of air blown toward the lower surface part of the article to be conveyed can be changed to a support air-blowing amount for supporting the article 2 to be conveyed in the non-contact state and an air-blowing amount different from the support air-blowing amount. COPYRIGHT: (C)2005,JPO&NCIPI
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