SOLID STATE IMAGING DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a small solid-state imaging device having a low loss and a high condensing efficiency. SOLUTION: The imaging device comprises solid-state imaging elements 11a, 11b, and 11c wherein a photonic crystal having a periodic refractive-index structure having low refractive-index materials 1 and high refractive-index materials 2 alternately laminated and having a periodic refractive-index structure of a similar shape (circle or polygon) concentric to an in-plane direction is located on photoelectric conversion elements. Only by the photonic crystal, the color separation and condensation of RGB can be simultaneously realized. Further the photonic crystal can be manufactured by a method for providing cavities of similar shapes concentric to the in-plane direction by lithography and etching in multiple layer films having a periodic refractive-index structure in a lamination direction or by a method for providing a periodic refractive-index structure of the in-plane and lamination directions by self cloning on a base of a similar shape concentric to the in-plane direction. COPYRIGHT: (C)2005,JPO&NCIPI