| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring accurately the temperature in a wide temperature range in an environment below a micro-meter size. SOLUTION: The change of the temperature and the length of gallium in this temperature sensing element comprising a carbon nanotube including continuous columnar gallium is measured beforehand. Then, the temperature sensing element is installed on a temperature measuring object and heated in the air, and thereafter taken out. Then, the gallium length is measured, and the measured gallium length is substituted for a formula to thereby perform measurement. COPYRIGHT: (C)2005,JPO&NCIPI
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