| 摘要 |
PROBLEM TO BE SOLVED: To obtain a transmitted image having high resolution, and to reduce the size of overall system. SOLUTION: X rays, generated by an X-ray occurrence source 7, are constricted approximately to a diameter of 500μm by the minute circular hole of an incident side diaphragm 8, are transmitted through a liquid crystal display panel 12, are constricted to approximately a diameter of 0.1μm by the minute circular hole of an emission side diaphragm 10, and are applied to an X-ray detector 9. At this time, a sample-retaining tool 2 and a liquid crystal display panel 12 are subjected to minute movement by a minimum of 0.1 nm in Z and Y directions, by the minute movement of a Z-directional shifter 4 and an X-directional shifter 5. Resolution at this time is determined by constriction (approximately 0.1μm diameter) at the emission side diaphragm 10 and the minute amount of travel (approximately 0.1 nm) in Z and X directions of the sample-retaining tool 2, and high resolution that is equal to or smaller than constriction (approximately 0.1μm diameter) at the emission side diaphragm 10 is obtained. Additionally, since the interval between the X-ray occurrence source 7 and an X-ray detector 9 is not related to the resolution, the system as a whole can be reduced in size by reducing the interval. COPYRIGHT: (C)2005,JPO&NCIPI
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