| 发明名称 |
Method and apparatus for maintaining a machine part |
| 摘要 |
A method of and apparatus for maintaining a machine part arranged in an interior space of a machine, where the interior space is kept at a first pressure and is separated from an environment having a second pressure via a load lock. The method includes transporting a machine part via the load lock out of the interior space and transporting via the load lock into the interior space one of the maintained machine part and a separate replacement machine part.
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| 申请公布号 |
US2005019709(A1) |
申请公布日期 |
2005.01.27 |
| 申请号 |
US20040797664 |
申请日期 |
2004.03.11 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VAN GROOS PIETER JOHANNES MARIUS;HOOGKAMP JAN FREDERIK;VUGTS JOSEPHUS ANTONIUS;LIVESEY ROBERT GORDON;FRANSSEN JOHANNES HENDRIKUS GERTRUDIS;KLOMP ALBERT JAN HENDRIK;VERMEULEN JOHANNES PETRUS MARINUS BERNARDUS;LOOPSTRA ERIK ROELOF |
| 分类号 |
H01L21/677;G03F7/20;H01L21/027;H01L21/683;(IPC1-7):G03F9/00 |
主分类号 |
H01L21/677 |
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