An improved microforce sensing system is provided. The microforce sensing system includes: a force sensor (10) configured to detect a contact force exerted on a contact tip (12) of the cantilever (14) and operable to generate a signal indicative of the contact force, where the cantilever (14) is constructed from a polyvinylidene fluoride material in the form of a substantially rectangular plate or other suitable shapes; and a processing circuit (70) adapted to receive the signal from the force sensor (10) and operable to determine the contact force exerted on the tip by integrating the signal from the force sensor (10).
申请公布号
WO2005008678(A1)
申请公布日期
2005.01.27
申请号
WO2004US22201
申请日期
2004.07.08
申请人
BOARD OF TRUSTEES OPERATING MICHIGAN STATE UNIVERSITY;SALEM, FATHI, M.;XI, NING;SHEN, YANTAO