INTEGRATED ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an integrated electronic device wherein the system is constructed by integrating a micron-rule or submicron-rule functional device structure on a system substrate, and to provide a method for manufacturing the same. SOLUTION: A functional device manufactured on a substrate in a first process and having a plurality of input/output electrodes comprises a functional structure 21 formed separate from the substrate, a region 13 for mounting a functional structure 21; a substrate structure 10 manufactured in a second process and having a plurality of input/out electrodes to be connected to another plurality of input/output electrodes; and wires deposited by beam excited reaction for connecting the plurality of input/output electrodes of the substrate structure 10 and the plurality of corresponding input/output electrodes of the functional structure 21. The functional structure 21 is so designed that step formation is suppressed along the routes of the wires. COPYRIGHT: (C)2005,JPO&NCIPI