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发明名称
VERFAHREN ZUM PRÜFEN EINER ZU ANALYSIERENDEN OBERFLÄCHE UND SCANNER ZUR ANALYSE VON OBERFLÄCHEN
摘要
申请公布号
DE69922844(D1)
申请公布日期
2005.01.27
申请号
DE19996022844
申请日期
1999.09.08
申请人
ASM INTERNATIONAL N.V., BILTHOVEN
发明人
ASM INTERNATIONAL N.V., 3720 AC BILTHOVEN
分类号
G01N21/956;G01N21/89;G01N21/95;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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